IST-2004-2.4.2 - Technologies and devices for micro/nano-scale integration

Objectives: To push the limits of integrated micro/nano systems through research on a family of mixed technologies (combining for instance micro-nano-technology, ICT and biotechnology) and integration technologies for very high density or for integrating micro/nano devices in various materials and into large surfaces. Validation and demonstration of maturing silicon-based and polymer-based technologies, manufacturing and design issues are also targeted.

Focus

1. Heterogeneous technologies and devices for mixed-technology micro/nano systems (eg microfluidic/ICT/micro-nano, bio/ICT/micro-nano, chemical/ICT/micro-nano combined). Activities include research at the boundary and integration between different scientific and engineering disciplines, e.g. the combination of silicon and non-silicon technologies and multi-functional integrated micro/nano systems combining information technology with nano-biology, nano-chemistry and combining micro-fluidics and nano-chemistry.

These tasks are to be addressed through IPs and STREPS.

2. Technology for very high density hybrid integration (towards e-grains, e-dust). Research activities are to address a family of integration and interfacing technologies aiming at very high densities, unifying heterogeneous technologies including 3-dimensional vertical integration and very thin technologies. Integration of wireless communication interfaces, antennae, power provision and new functionalities into a very small volume/area is also envisaged.

These tasks are to be addressed through IPs and STREPs.

3. Integrating micro/nano devices in various materials and in or on large surfaces. Research activities aim at integrating micro/nano components and devices in different materials. Activities include sensing, actuating, interfacing, power control, processing and intelligent devices added to polymers, to plastics, to textiles, and to very large surfaces and very large area display technology and large area electronics. Research includes interfacing nano-to-nano;  nano-to-micro-to-macro  components; and connecting nano and micro devices to new materials (including connections to organic molecules, living cells).

These tasks are to be addressed through IPs and STREPs.

4. Manufacturing and design of mixed technology-based micro/nano systems. Focus of research activities is on flexible manufacturing and new processes, design and business or service concepts for combining different technologies requiring multi-competencies. In addition to research, service actions supporting academic research, feasibility design, prototyping, training and education through access to advanced tools, multi-project fabrication and design competency are called for.

These tasks are to be addressed through IPs (training with specific evaluation criteria).

5. Validation and demonstration of networked micro/nano systems and their use to address problems and opportunities in a holistic manner combining device, system, information management and application competencies. Application sectors emphasized are environment, the home, food and agriculture and healthcare.

These tasks are to be addressed through IPs.

6. Roadmaps, specific coordination and support activities to prepare for a research agenda and to build the research community in order to define major trends and to address the ICT-bio-micro-nano-technology combined field, their technologies and their applications and emphasizing multidisciplinarity and addressing research and innovation at the boundaries of different sciences.

These tasks are to be addressed through SSAs and CAs.