Workshop '' Nanobiotechnology: Achievements and trends'' cu participarea IMEC (Belgia)- Dr. Hercules Pereira Neves,
4 Mai 2004, Sala Bibliotecii Academiei Romane, ora 9
 

 

 

Isotropic Biocompatible Titanium Deposition on the
Carbon Scaffold Foam by ECR Sputtering

 

Cristian Petrica Lungu¹, Yoshikazu MATSUMURA²

and Masao YOSHINARI³ 

 

¹National Research Institute for Lasers, Plasma and Radiation Physics, Bucharest, Romania

²Japan Ultra-high Temperature Materials Research Institute, Ube, Yamaguchi, Japan

³Tokyo Dental College, Mihama, Chiba, Japan

  

 

Abstract 

Ti films, of 5 mm thickness were deposited uniformly on three-dimensional structures of carbon foam substrates using an electron cyclotron resonance (ECR) sputtering system. A cylindrical hollow cathode with internal diameter of 80 mm and external diameter of 90 mm and length of 60 mm, negatively biased, was used as Ti atoms supplier. The dc sputtering voltage applied to the target controlled the feeding with excited Ti atoms. The hardness of the films was found to be in the range of 250-300 HV and exhibited a significant indentation load effect. The film surfaces were smooth and showing a pure Ti preferentially grown on the 100 crystallographic phase. Flexural strength and elastic modulus of the carbon foam were improved by a factor of 1.5 and 2.6 respectively. 

 

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